Apparatus for clean transfer of objects

Details Apparatus for clean transfer of objects Apparatus for clean transfer of objects

1992-06-23

1994-11-15

Huppert, Michael S.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, 118719, 20429825, B65G 6500

Patent

active

053642198

ABSTRACT:
A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vaccum chamber includes a second transfer port, a second shutter for opening and closing the second transfer port, and a second connecting member surrounding the second transfer port. The second connecting member has at least an exterior portion. A closed space is formed between the first and second connecting members, so that the first and second shutters are movable within the closed space.

REFERENCES:
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patent: 4674939 (1987-06-01), Maney et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4732527 (1988-03-01), Conche
patent: 4851018 (1989-07-01), Lazzari et al.
patent: 4897963 (1990-02-01), Reboul et al.
patent: 4948979 (1990-08-01), Munakata et al.
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5058526 (1991-10-01), Matsushita et al.
patent: 5139459 (1992-08-01), Takahashi et al.

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