Apparatus for chemical vapor deposition of diamond including gra

Details Apparatus for chemical vapor deposition of diamond including gra Apparatus for chemical vapor deposition of diamond including gra

1993-07-26

1995-02-21

MaMahon, Timothy M.

Coating apparatus

Work holders, or handling devices

118728, 264 81, 428408, 428469, 432156, 432264, 432265, B05C 500

Patent

active

053912292

ABSTRACT:
Graphite substrate holders for employment in apparatus for chemical vapor deposition of diamond decrease the tendency of the formed diamond sheets to crack or shatter upon separation from the substrates. Said holders and the substrates therein preferably have rounded edges, to suppress crack formation at sharp corners. The holders are preferably coated, at least in part, with a tie-layer and a hydride-forming metal such as niobium. Also, certain maximum distances between the edges of the holder and substrates are preferably maintained in order to prevent contact of diamond with a heated filament employed for thermal activation.

REFERENCES:
patent: 5082359 (1992-01-01), Kirkpatrick
patent: 5204145 (1993-04-01), Gasworth
patent: 5221501 (1993-06-01), Feldman et al.
patent: 5294381 (1994-03-01), Iguchi et al.

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