Apparatus for checking semiconductor wafers with complementary l

Details Apparatus for checking semiconductor wafers with complementary l Apparatus for checking semiconductor wafers with complementary l

1995-04-20

1997-07-01

Le, Que

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250239, 356237, G01N 2186

Patent

active

056441401

ABSTRACT:
One embodiment of an apparatus for checking semiconductor wafers includes a receiver for a semiconductor wafer to be checked. A light illuminates the wafer. A hemispherical hood has a surface and a hemispherical region defining an interior inside the hemispherical region. A further hood is disposed in the vicinity of the light. A camera is disposed at the hemispherical hood and has a lens looking into the interior inside the hemispherical hood. A evaluator is connected to the camera for controlling the camera and receiving, buffer-storing, processing and outputing data transmitted by the camera. Another embodiment includes a first light directly illuminates the wafer with light of a first color and a second light indirectly illuminates the wafer with light of a second color being complementary to the first color. A surface of the hood is of the second color. The further hood is opaque to incident light, permitting the wafer to be illuminated directly by the first light, and permitting the wafer to only be illuminated indirectly by the second light. A first camera has a filter admitting only light of the first color and a second camera has a filter admitting only light of the second color and being disposed at an angle greater than 0.degree. relative to a center point of the receiver for the semiconductor wafer to be checked.

REFERENCES:
patent: 4876455 (1989-10-01), Sanderson et al.
patent: 4929081 (1990-05-01), Yamamoto et al.
patent: 5172005 (1992-12-01), Cochran et al.
patent: 5302836 (1994-04-01), Siu

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