Abrading – Machine – Rotary tool
Patent
1993-06-02
1996-02-13
Rose, Robert A.
Abrading
Machine
Rotary tool
451 44, B24B 906
Patent
active
054908116
ABSTRACT:
A method and apparatus is provided for chamfering a notch of a wafer by controlling the operation of a disc shaped rotational grandstone by means of a profiling control mechanism, including a holding and rotation mechanism for rotating the wafer around the central axis normal to a principal surface of the wafer within a predetermined range of angle; a reference plate having a diameter and a thickness the same as a similar enlargement of the wafer and a chamfering guide surface the same as a similar enlargement of a surface to be formed on the notch by the chamfering at the same enlargement factor as the reference plate; and a disc having a predetermined diameter and a predetermined thickness. The method comprises fixing the wafer to the holding and rotation mechanism; rotating the wafer within the predetermined range and the reference plate within the same range, moving the disc in the thickness direction of the reference plate and the direction parallel to a surface of the reference plate in order that the outer periphery of the disc makes contact with the reference plate; detecting the direction and the amount of the motion of the disc making contact with the chamfering guide surface; decreasing detected data by a factor of the inverse of an enlargement factor; and chamfering the notch of the wafer by contacting the outer periphery of the grindstone with the notch in accordance with decreased data.
REFERENCES:
patent: 3815288 (1974-06-01), Wilson
patent: 3864878 (1975-02-01), Ledebur et al.
patent: 4167836 (1979-09-01), Takishima
patent: 4905425 (1990-03-01), Sekigawa et al.
patent: 5009038 (1991-04-01), Yoshikawa et al.
patent: 5036624 (1991-08-01), Steere, Jr.
patent: 5185965 (1993-02-01), Ozaki
Rose Robert A.
Shin-Etsu Handotai & Co., Ltd.
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