Heat exchange – Movable heating or cooling surface – Rotary drum
Patent
1993-05-03
1996-05-14
Ford, John K.
Heat exchange
Movable heating or cooling surface
Rotary drum
16510433, 165908, 165 64, 165 804, 324760, F25B 2900
Patent
active
055159109
ABSTRACT:
A thermal control system for use with a burn-in system, the thermal control system capable of delivering a thermally preconditioned liquid to a plurality of semiconductor devices during burn-in. The thermal control system comprises a liquid reservoir containing a liquid, a pump, and a plurality of spray nozzle arrays. The liquid contained in the liquid reservoir is thermally preconditioned through the use of a heating element and a cooling element and the temperature of the liquid provided to each spray nozzle array is individually controlled through the use of a pipe heating element. The liquid is collected and returned to the liquid reservoir after being sprayed on the semiconductor devices.
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Bloch Brian R.
Hamilton Harold E.
Zimmer James R.
Ford John K.
Micro Control System
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