Apparatus for automatic optical property testing

Details Apparatus for automatic optical property testing Apparatus for automatic optical property testing

1983-01-24

1986-04-22

Rosenberger, R. A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, G01B 1114

Patent

active

045838577

ABSTRACT:
For testing substantially two-dimensional relief-structured patterns, in particular circuit boards, an optical scanning head is used which directs a light band according to the light sectioning principle at an angle .alpha. to the printed circuit board (10) and in which a linear scanning diode array (17a) is positioned in such a manner that it receives only such light as is reflected by the circuit boards whose surfaces have the nominal height h from the base plate (10). For continuously controlling the operating distance (1) between the linear diode array (17a) and the base plate (10), a pair of linear diode arrays (17b) is arranged parallel to the diode array between which the light reflected at the base plate (10) is incident if the nominal operating distance (1) has been kept and on which this light impinges if deviations of the operating distance have occurred. In each position of the light band, the scanning diode array (17a) is read with respect to the sample and data are fed to an evaluator circuit testing the nominal values of conductor widths and the minimum distances between conductors. Profile test circuits (212) determine whether in the case of deviations from the nominal values there are other permissible geometrical shapes (such as soldering pads).

REFERENCES:
patent: 3187185 (1965-06-01), Milnes
patent: 3612890 (1971-10-01), Cornyn et al.
patent: 3976382 (1976-08-01), Westby
patent: 4105925 (1978-08-01), Rossol et al.
patent: 4188544 (1980-02-01), Chasson
patent: 4472056 (1984-09-01), Nakagawa et al.

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