Apparatus for automated cassette handling

Details Apparatus for automated cassette handling Apparatus for automated cassette handling

1987-07-09

1990-05-08

Werner, Frank E.

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means is a horizontally rotated arm

B65G 6502

Patent

active

049233530

ABSTRACT:
An automated cassette handler transports a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

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patent: 4558984 (1985-12-01), Garrett
patent: 4668484 (1987-05-01), Elliott
patent: 4674939 (1987-06-01), Maney et al.
patent: 4815912 (1989-03-01), Maney et al.

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