Apparatus for automated cassette handling

Details Apparatus for automated cassette handling Apparatus for automated cassette handling

1985-07-24

1987-11-10

Werner, Frank E.

Material or article handling

Apparatus for charging a load holding or supporting element...

Transporting means is a horizontally rotated arm

118729, 432239, 414917, 414217, 414733, 414609, 414626, 414618, 414730, B65G 6502

Patent

active

047054441

ABSTRACT:
An automated cassette handler for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

REFERENCES:
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patent: 4343584 (1982-08-01), Hudgins
patent: 4345866 (1982-08-01), Greene
patent: 4500407 (1985-02-01), Boys et al.
patent: 4532970 (1985-08-01), Tullis et al.
patent: 4534389 (1985-08-01), Tullis
patent: 4558984 (1985-12-01), Garrett

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