Coating apparatus – Immersion or work-confined pool type – With tank structure – liquid supply – control – and/or...
Patent
1998-04-06
2000-02-01
Beck, Shrive
Coating apparatus
Immersion or work-confined pool type
With tank structure, liquid supply, control, and/or...
118 56, 1341021, 134186, B05C 300
Patent
active
060198478
ABSTRACT:
A chamber includes a door which opens to introduce a workpiece into the chamber and which closes to enclose the workpiece within the chamber. A workpiece support is located within said chamber and supports the workpiece such that a coated surface of the workpiece faces in a given direction. A liquid supply mechanism floods the chamber with a liquid to immerse the workpiece support. A pressure pulse supply mechanism applies a pulse of pressure to the liquid such that the pulse of pressure is transmitted through the liquid in a direction opposite the given direction. The pulse of pressure is incident via the liquid on the coated surface of the workpiece supported by the workpiece support.
REFERENCES:
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patent: 5279316 (1994-01-01), Miranda
patent: 5308792 (1994-05-01), Okabayashi et al.
patent: 5474796 (1995-12-01), Brennan
patent: 5620524 (1997-04-01), Fan et al.
patent: 5843535 (1998-12-01), Dobson
Beck Shrive
Chen Bret
Trikon Technologies, Ltd.
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