Apparatus for applying high frequency ultrasonic energy to clean

Details Apparatus for applying high frequency ultrasonic energy to clean Apparatus for applying high frequency ultrasonic energy to clean

1984-10-29

1986-07-22

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310323, 310334, 366118, 366127, H01L 4108

Patent

active

046021841

ABSTRACT:
High frequency ultrasonic energy is applied to a liquid medium to produce low micron size cavitation in the liquid for enhancing the cleaning or etching action of exposed surfaces within the liquid. An ultrasonic transducer is bonded to a vibration coupler which is formed of a material that is inpervious to the liquid medium and functions to efficiently transmit the ultrasonic vibrations to the liquid medium. The coupler is partially immersed in the liquid while maintaining the transducer elevated above the liquid.

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