Apparatus for application of coatings in vacuum

Details Apparatus for application of coatings in vacuum Apparatus for application of coatings in vacuum

1993-11-04

1995-07-25

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Vacuum arc discharge coating

20419238, 118723R, C23C 1422, H01L 2100

Patent

active

054359007

ABSTRACT:
An apparatus for the production of coatings in a vacuum provides a plasma guide in the shape of a parallelepiped having a substrate holder and plasma source on adjacent planes. A magnetic deflecting system is formed by linear conductors arranged along the edges of the parallelepiped, comprising 1, 2, 3 or 4 rectangular coils for controlling the plasma flow.

REFERENCES:
patent: 4452686 (1984-06-01), Axenov et al.
patent: 4492845 (1985-01-01), Kljuchko et al.
patent: 4929321 (1990-05-01), Buhl
patent: 5009922 (1991-04-01), Harano
patent: 5279723 (1994-01-01), Falabella et al.
patent: 5282944 (1994-02-01), Sanders
P. J. Martin et al., The Deposition of Thin Films by Filtered Arc Evaporation, 1992, pp. 136-142.

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