Apparatus for angular-resolved spectroscopic lithography...

Details Apparatus for angular-resolved spectroscopic lithography... Apparatus for angular-resolved spectroscopic lithography...

2007-02-09

2010-02-09

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S628000

Reexamination Certificate

active

07659988

ABSTRACT:
To inspect all portions of the substrate the substrate table can be moved rotationally and linearly. Furthermore the detector can be moved rotationally. This enables all portions of a surface of the substrate to be inspected from all angles in a plane parallel to the substrate. Less linear motion is needed, so the apparatus occupies a smaller volume and generates smaller vibrations.

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Kok et al., “Apparatus for Angular-Resolved Spectroscopic Lithography Characterization and Device Manufacturing Method”, U.S. Appl. No. 11/478,306, filed Jun. 30, 2006.
Non-Final Rejection mailed Sep. 8, 2008 for U.S. Appl. No. 11/478,306, filed Jun. 30, 2006, 7 pgs.
Final Rejection mailed Mar. 9, 2009 for U.S. Appl. No. 11/478,306, 8 pgs (incorrectly labeled Non-Final Rejection).
Non-Final Rejection mailed Jul. 17, 2009 for U.S. Appl. No. 11/478,306, 10 pgs.
Final Rejection mailed Dec. 14, 2009 for U.S. Appl. No. 11/478,306, 10 pgs.

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