Apparatus for angular-resolved spectroscopic lithography...

Details Apparatus for angular-resolved spectroscopic lithography... Apparatus for angular-resolved spectroscopic lithography...

2011-08-16

2011-08-16

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Of light reflection

C356S400000

Reexamination Certificate

active

07999940

ABSTRACT:
To inspect all portions of the substrate the substrate table can be moved rotationally and linearly. Furthermore the detector can be moved rotationally. This enables all portions of a surface of the substrate to be inspected from all angles in a plane parallel to the substrate. Less linear motion is needed, so the apparatus occupies a smaller volume and generates smaller vibrations.

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