Apparatus for and method of transferring substrates

Details Apparatus for and method of transferring substrates Apparatus for and method of transferring substrates

2005-11-08

2005-11-08

Keenan, James W. (Department: 3652)

Material or article handling

Process

Including vertically swinging load support

C414S941000, C414S752100

Reexamination Certificate

active

06962477

ABSTRACT:
A substrate transfer apparatus capable of preventing contaminants from sticking to a substrate again when the substrate is unloaded, wherein a first support member and a second support member are provided on an arm, the first support member supporting the substrate when the substrate is loaded into a processing machine and the second support member supporting the substrate when the substrate is unloaded from the processing machine.

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