Apparatus for and method of transferring substrates

Details Apparatus for and method of transferring substrates Apparatus for and method of transferring substrates

1998-05-12

2000-11-28

Bueker, Richard

Material or article handling

Vertically swinging load support

Grab

414936, 414941, 414737, B66C 100

Patent

active

061526770

ABSTRACT:
A substrate transfer apparatus capable of preventing contaminants from sticking to a substrate again when the substrate is unloaded, wherein a first support member and a second support member are provided on an arm, the first support member supporting the substrate when the substrate is loaded into a processing machine and the second support member supporting the substrate when the substrate is unloaded from the processing machine.

REFERENCES:
patent: 5522932 (1996-06-01), Wong et al.
patent: 5605574 (1997-02-01), Tsunashima et al.
patent: 5679055 (1997-10-01), Greene et al.
patent: 5695817 (1997-12-01), Tateyama et al.
patent: 5900062 (1999-05-01), Loewenhardt et al.
patent: 5989346 (1999-11-01), Hiroki

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