Abrading – Abrading process – Glass or stone abrading
Patent
1994-05-06
1998-03-10
Smith, James G.
Abrading
Abrading process
Glass or stone abrading
451289, 451 7, B24B 100, B24B 719, B24B 730
Patent
active
057254133
ABSTRACT:
Disclosed are polished and planarized diamond films and a method and apparatus for polishing and planarizing diamond films. The method generally includes mechanical polishing of the diamond film against a ceramic surface in the presence of a treating agent of potassium nitrate and a polishing agent of potassium hydroxide. The produced films have an average surface roughness on the order of 0.05 microns, a planarization uniformity within eight percent, and are relatively free of process-induced contaminants.
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Brown William D.
Malshe Ajay P.
Naseem Hameed A.
Banks Derris H.
Board of Trustees of the University of Arkansas
Gilbreth J.M. (Mark)
Smith James G.
Strozier Robert W.
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