Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-04-26
2005-04-26
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06885460
ABSTRACT:
An apparatus for measuring an object's surface shape that obtains complex amplitude at a plurality of positions substantially in the directions of the optical axis of the light reflected by the object and calculates the first surface shape of the object by the depth-from-focus principle. On the other hand, using the phase data of the complex amplitude, the apparatus can measure a micro shape in the sub-fringe order by ordinary laser interference measurement. The first surface shape data are applied to a region including a step of a height greater than ½ of the light's wavelength and second surface shape data are applied to the other region.
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M. Ishihara, et al., Journal of Japan Society for Precision Engineering, vol. 63, No. 1, pp. 124-128, “High Speed 3-D Shape Measuring Apparatus Using Shape from Focus Method”, 1997.
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Lyons Michael A.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Turner Samuel A.
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