Electricity: measuring and testing – Using ionization effects – For monitoring pressure
Reexamination Certificate
2006-10-21
2008-11-25
Gutierrez, Diego (Department: 2831)
Electricity: measuring and testing
Using ionization effects
For monitoring pressure
C324S464000, C324S459000
Reexamination Certificate
active
07456633
ABSTRACT:
Disclosed herein are an apparatus for and method of measuring the composition and the pressure of the discharged gas from an ion gauge by using a residual gas analyzer. In this regard, there are provided a vacuum container200divided into a pressure container210and a discharge container220by means of a partition235having an orifice230formed thereon; an ion gauge100mounted at the pressure container210side of the vacuum container200for discharging the gas at the time of vacuum formation; a residual gas analyzer240mounted at the pressure container210side of the vacuum container200for measuring the composition and the pressure of the residual gas; pump means disposed at one side of the discharge container220of the vacuum container200for discharging the inside gas; and heating means disposed at the vacuum container200for heating the vacuum container200to a predetermined temperature.
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Chung Kwang Hwa
Hong Seung Soo
Shin Yong Hyeon
DeMont & Breyer LLC
Gutierrez Diego
Korean Research Institute of Standards and Science
Zhu John
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