Apparatus for and method of measuring boundary surface

Details Apparatus for and method of measuring boundary surface Apparatus for and method of measuring boundary surface

1987-08-20

1988-08-30

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, 356446, G01B 1100

Patent

active

047672110

ABSTRACT:
An apparatus for and a method of measuring a boundary surface of a sample are disclosed in which a ratio of the light quantity of a part of reflected light from a sample which travels in the vicinity of the optical axis of the reflected light, to the light quantity of another part of the reflected light which is directed to a position deviating from the optical axis by a predetermined distance is used to accurately measure a boundary surface of a sample. Since the accuracy of measurement is increased by using the above ratio, light capable of passing through the sample can be used as incident light. Thus, a deep hole in the surface of the sample and a void such as an air bubble in a living being sample, which cannot be measured by the prior art, can be measured very accurately.

REFERENCES:
patent: 3229564 (1966-01-01), Meltzer
patent: 4112309 (1978-09-01), Nakazawa et al.
patent: 4202627 (1980-05-01), Suzki et al.
patent: 4464050 (1984-08-01), Kato et al.
patent: 4525630 (1985-06-01), Chapman
patent: 4547895 (1985-10-01), Mita et al.

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