Apparatus for and method of measurement of aspheric surfaces...

Optics: measuring and testing – By light interference – Holography

Reexamination Certificate

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C356S513000

Reexamination Certificate

active

07072042

ABSTRACT:
An aspheric surface measuring apparatus includes an interferometer which generates incident light; a test piece having an aspheric surface from which the incident light is reflected as test light; a first optical element disposed on an optical path of the incident light, having at least one surface with a hologram for diffracting the incident light toward the test piece; and a second optical element disposed after the first optical element, which transmits the incident light toward the aspheric surface and has a concave surface to reduce an incident angle of the test light entering the hologram after having been reflected from the aspheric surface. Alternatively, a single optical element with a hologram and a concave surface can be used instead of the separate first and second optical elements. An extremely aspheric lens can be precisely measured using the apparatus.

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Kobayashi, Kosei JP 363223538A, Mar. 13, 1987.
Zygo® GPI XP™ and GPI XPHR™ Specifications.
Zygo® product description.
Zygo® Transmission Sphere Selection.

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