Optical: systems and elements – Deflection using a moving element – Using a periodically moving element
Patent
1996-05-20
1998-09-01
Phan, James
Optical: systems and elements
Deflection using a moving element
Using a periodically moving element
359201, 21912173, G02B 2608
Patent
active
058018689
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to an apparatus for and a method of laser marking and, in particular, to an apparatus for and a method of performing marking continuously on a plurality of objects to be marked while the objects are moving.
BACKGROUND ART
When marking patterns, consisting of any characters, symbols, figures, designs, etc., on workpieces formed of metal, plastic, ceramic, paper, cloth, etc., manufactured by production lines in plants, it has been general practice to use an ink-jet system (See, for example, Japanese Patent Laid-Open No. 57-14981). In this system, recording is effected while varying the positional relationship between the workpiece and the nozzle of an ink jet by means of a conveying device, so that an interlock between the conveying device and-the ink jet is indispensable.
However, as the miniaturization of semiconductor products, etc., proceeds, the marks to be recorded are now required to be smaller and more precise. Under the circumstances, attention is being given to a laser marking apparatus as an alternative to the ink-jet system. In a suitable example of the laser marking apparatus, raster scanning is performed on the surface of a mask with a laser beam from a laser generator by means of a deflector to thereby effect marking on the surface of a workpiece with the laser beam transmitted through the mask, which has a predetermined pattern.
However, in the above-described laser marking apparatus, in which the laser beam transmitted through the mask is deflected toward the workpiece conveying line, the beam application area is stationary, and a workpiece is temporarily brought to a stop upon reaching this application area, so that the laser beam can be applied to the surface of the workpiece to thereby effect marking thereon, which is thus caused to stay. Thus, it is necessary for the conveying line to be stopped each time a marking operation is performed on a workpiece, resulting in a rather poor productivity.
SUMMARY OF THE INVENTION
The present invention has been made with a view toward eliminating the above problem in the prior art. It is accordingly an object of the present invention to provide an apparatus for and a method of laser marking in which marking can be effected on workpieces being continuously conveyed, without having to bring them to a stop at intervals, whereby it is possible to achieve an improvement in terms of production efficiency.
A laser marking apparatus according to the present invention includes a second deflector having a mirror for reflecting a laser beam transmitted through a mask and movable lenses for receiving the laser beam from this reflective mirror and applying it to the surface of a workpiece for marking, with the movable lenses being mounted on a moving mechanism which moves in synchronism with the speed at which the workpiece is conveyed. The reflective mirror is composed of a first mirror for receiving and reflecting the laser beam transmitted through the mask and a second mirror for reflecting the reflected beam from the first mirror to the movable lenses, with the direction of the reflected beam from the first mirror being switchable with respect to the second mirror or the movable lenses. Further, the reflective mirror can be composed of a movable mirror for receiving and reflecting the laser beam transmitted through a mask, a rotating mirror which reflects the reflected beam from the movable mirror to the movable lens and which is capable of planar rotation, and a stationary mirror capable of receiving the reflected beam due to the displacement of the movable mirror and reflecting it to the rotating mirror, with the direction of the reflected beam from the movable mirror being switchable, through displacement of the movable mirror, to the rotating mirror or to the stationary mirror. Further, the above-mentioned reflective mirror can be composed of a first mirror for receiving and reflecting laser beam transmitted through a mask, a second mirror for reflecting the reflected beam from the first mirror to movab
REFERENCES:
patent: 4746202 (1988-05-01), Perilloux et al.
patent: 5309273 (1994-05-01), Mori et al.
patent: 5605641 (1997-02-01), Chiba et al.
Hayasaka Kazuhiro
Ichihara Masashi
Komatsu Ltd.
Phan James
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