Data processing: structural design – modeling – simulation – and em – Simulating nonelectrical device or system – Fluid
Reexamination Certificate
1999-07-15
2004-03-09
Teska, Kevin J. (Department: 2123)
Data processing: structural design, modeling, simulation, and em
Simulating nonelectrical device or system
Fluid
C703S012000, C703S001000, C702S012000, C345S630000, 36, 36
Reexamination Certificate
active
06704696
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to a designing apparastus and a designing method for use in designing fluid control devices which are useful, for example, for systems for fabricating semiconductors.
Fluid control devices are already known which are obtained by connecting a plurality of fluid controllers by a plurality of coupling members. Such a fluid control device is designed by preparing a plan view (see
FIG. 7
) of the actual fluid control device with reference to a flowchart (see
FIG. 6
) showing the component fluid controllers and connections thereof, then determining the coupling members required for interconnecting these controllers and thereafter preparing a list of components of the device and an estimate of the device.
With reference to
FIG. 6
, indicated at
51
,
52
,
54
,
55
are on-off valves, at
53
massflow controllers (MFCs), at
56
check valves, at
57
massflow meters (MFMs), at
58
pressure sensors (PTs), at
59
pressure regulators (RGs), at
60
filters, at
61
manual valves (HVs), and
62
connecting piping between adjacent lines.
In
FIGS. 6 and 7
, like parts are designated by like reference numerals
51
to
62
. For example in
FIG. 7
, the pair of on-off valves
51
,
52
(
54
,
55
) provided at the inlet (outlet) side of the massflow controller
53
are mounted on a single block
63
(
64
) and handled as a single component. Block couplings
65
,
65
are attached respectively to the inlet side and outlet side of the massflow controller
53
to ensure facilitated connection to blocks
63
,
64
adjacent to the controller. Thus, contrivances are added to the flowchart of
FIG. 6
to show the actual fluid control device.
The two kinds of drawings will be described in detail. Although the fluid channels are apparent from the flowchart of
FIG. 6
which is provided by the customer who is to use the fluid control device, no consideration is given to the drawing as to the sizes of the components or the spaces between adjacent members. On the other hand,
FIG. 7
which is a plan view of the fluid control device prepared by the designer of the device shows the sizes of the components and the spacings between the adjacent members, whereas the drawing fails to clearly show the fluid channels through the components to the customer, and the worker who is to fabricate or inspect the device. Furthermore, much time and labor are required for determining the particular coupling members to be used or preparing a list of components of the device and an estimate thereof with reference to
FIG. 7
, and the procedures involved are very likely to permit occurrence human errors.
SUMMARY OF THE INVENTION
An object of the present invention is to provide an apparatus for designing fluid control devices which makes it possible to prepare a flowchart showing not only the fluid channels but also the sizes of components or members and the spacings between the adjacent members.
Another object of the invention is to provide an apparatus for designing fluid control devices which is adapted to automatically prepare a three-dimensional assembly drawing of the fluid control device.
Another object of the invention is to provide an apparatus for designing fluid control devices which assures reduced time and labor in preparing a list of components of the device and an estimate thereof and which is adapted to eliminate the human errors to be involved in the preparation procedures.
Still another object of the invention is to provide a method of designing fluid control devices with a remarkably improved efficiency.
The present invention provides an apparatus for designing by a programmed computer a fluid control device to be obtained by connecting a plurality of fluid controllers by a plurality of coupling members, the apparatus comprising symbol mark memory means for storing fluid controllers usable in fluid control devices in terms of symbol marks representing the functions, fluid channels and contours of the controllers, instruction means for arranging the combination of symbol marks of the fluid controllers for use in the fluid control device to be designed, and a flowchart preparing means for preparing a flowchart of the fluid control device represented in symbol marks by the instruction means.
Examples of fluid controllers are monofunctional members such as massflow controllers, on-off valves, check valves, pressure regulators, filters, massflow meters and pressure sensors; a unit of two monofunctional members (for example, two on-off valves, or a filter and a pressure sensor) as mounted on a single block; and the assembly of a monofunctional member (such as a massflow controller) and a coupling member attached to each side of the member.
Preferably, the coupling member to be used is a so-called block coupling which is a rectangular parallelepipedal block formed with a communication fluid channel, whereas couplings other than block couplings are usable insofar as they are adapted to connect the fluid channels of fluid controllers.
Fluid control devices are obtained by connecting a plurality of fluid controllers by a plurality of coupling members. It is desirable to arrange the fluid controllers at an upper stage and the coupling members at a lower stage. In this case, the coupling members of lower stage are fastened to a base plate of aluminum or the like with screws, and each fluid controller of upper stage is fastened with screws to adjacent two of the coupling members like a bridge.
The symbol mark is such that for example, a controller, such as a valve, which is given a JIS designation is assigned a symbol mark comprising the JIS designation and an indication of the fluid channel and contour thereof. The massflow controller which has no JIS designation is given a symbol mark comprising an abbreviation or acronym, such as MFC, and an indication of the fluid channel and contour thereof. The contour is expressed in terms of the size in plan view. In the case where a controller differs from those of the same type only in fluid channel or in length, the controller is handled as another fluid controller, that is, it is referred to by a different symbol mark. Each fluid controller is assigned a suitable item number, the item number and the symbol mark thereof are used in a pair, and many such pairs are stored in the symbol mark memory means.
The specifications of the desired fluid control device are presented in the form shown in
FIG. 6
by the process designer of the control functions of the device, while the fabrication designer of the device inputs into the designing apparatus the item number of each of the controllers having the corresponding control functions while giving consideration to various design factors, for example, as to whether two on-off valves are to be composed of two members, whether two on-off valves are to be provided by a single member as a unit, whether two adjacent valves are to be interconnected by welding a tube thereto, or whether two adjacent valves are to be interconnected by a block coupling. When the item number of a particular control device is input, the corresponding controller symbol mark is displayed on the screen of the apparatus. The fabrication designer affixes such symbol marks to the screen successively at specified positions to prepare a flowchart. Since the flow chart shows not only the functions of the component fluid controllers but also the fluid channels and contours thereof by symbol marks, the functions, fluid channels and sizes of the members to be used in the fluid control device are all manifestly shown.
Preferably, the designing apparatus further comprises controller data memory means for storing data as to the fluid controllers usable in fluid control devices, coupling member data memory means for storing data as to coupling members usable in fluid control devices, coupling member selecting means for selecting from the coupling member data memory means the coupling members required for connecting said plurality of fluid controllers with reference to the flowchart prepared, and assembly drawing
Hatano Masayuki
Kuramochi Michio
Ogawa Hiroshi
Armstrong Kratz Quintos Hanson & Brooks, LLP
Ferris, III Fred O
Fujikin Incorporated
Teska Kevin J.
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