Apparatus for and method of aligning a structure

Details Apparatus for and method of aligning a structure Apparatus for and method of aligning a structure

2006-09-19

2006-09-19

Tarcza, Thomas H. (Department: 3662)

Optics: measuring and testing

Angle measuring or angular axial alignment

With photodetection remote from measured angle

C356S152200, C356S614000, C356S622000

Reexamination Certificate

active

07110103

ABSTRACT:
An apparatus for determining the orientation and/or position of a structure comprises a light source (28) for generating a light beam. A structure (31) is mounted in the optical path of the light beam such that the position and/or orientation of the structure, relative to the light beam, may be altered. The apparatus further comprises first capture means (32) for capturing a diffraction pattern produced by the first structure. Information about the alignment of the structure may be obtained from the diffraction pattern, and the position and/or orientation of the structure (31) relative to the light beam may be adjusted if necessary.

REFERENCES:
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3865483 (1975-02-01), Wojcik
patent: 5625453 (1997-04-01), Matsumoto et al.
patent: 5751426 (1998-05-01), Nose et al.
patent: 2002/0080365 (2002-06-01), Monshouwer et al.

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