Abrading – Abrading process – Glass or stone abrading
Reissue Patent
2005-10-25
2005-10-25
Nguyen, George (Department: 3723)
Abrading
Abrading process
Glass or stone abrading
C451S005000, C451S285000, C451S286000, C451S288000
Reissue Patent
active
RE038854
ABSTRACT:
A polishing apparatus for polishing a workpiece such as a semiconductor wafer has a turntable with a polishing surface, and a top ring for holding a workpiece and pressing the workpiece against the polishing surface under a first pressing. The polishing apparatus has a pressurized fluid source for supplying pressurized fluid, and a plurality of openings provided in the holding surface of the top ring for ejecting the pressurized fluid supplied from the pressurized fluid source. A plurality of areas each having the openings are defined on the holding surface so that the pressurized fluid is selectively ejectable from the openings in the respective areas.
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Kimura Norio
Nakashiba Masamichi
Watanabe Isamu
Yoshida Kaori
Ebara Corporation
Nguyen George
Wenderoth , Lind & Ponack, L.L.P.
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