Apparatus for analyzing organic substance and method for the sam

Details Apparatus for analyzing organic substance and method for the sam Apparatus for analyzing organic substance and method for the sam

1994-12-15

1996-06-04

Spitzer, Robert

Gas separation: processes

Chromatography

With heating or cooling

95115, 95143, 96101, 96143, 73 1902, 73 2327, B01D 1508

Patent

active

055229182

ABSTRACT:
A method for analyzing organic substances, includes the steps of subcooling a semiconductor substrate to a temperature at least lower than an ambient temperature, trapping volatile organic substances present in an atmosphere on the semiconductor substrate, heating the semiconductor substrate to thereby remove the volatile organic substances from the semiconductor substrate, and analyzing the volatile organic substances. This method is capable of selectively trapping to analyze only organic substances which might be adsorbed to a semiconductor device and thereby deleteriously affect the performances of the semiconductor device.

REFERENCES:
patent: 3769776 (1973-11-01), Berg
patent: 4003257 (1977-01-01), Fletcher et al.
patent: 4500432 (1985-02-01), Poole et al.
patent: 4636227 (1987-01-01), Yin et al.
patent: 4684510 (1987-08-01), Harkins
patent: 4805441 (1989-02-01), Sides et al.
patent: 5152176 (1992-10-01), Bryselbout et al.

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