Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2005-07-19
2005-07-19
Coleman, W. David (Department: 2823)
Semiconductor device manufacturing: process
With measuring or testing
C438S687000, C205S118000
Reexamination Certificate
active
06919214
ABSTRACT:
An apparatus for analyzing a substrate employing a copper decoration includes a bath having at least two receiving containers for receiving electrolytes, slots formed at insides of the receiving containers for receiving substrates to be analyzed in a direction that is normal to a bottom face of the bath, lower copper plates provided in the receiving containers, the lower copper plates making contact with entire rear faces of the substrates received in the receiving containers, upper copper plates provided in the receiving containers, each of the upper copper plates corresponding to a respective one of the lower copper plates, and separated from front faces of the substrates, and a power source connected to the upper copper plates and the lower copper plates for providing voltages to the same. A plurality of substrates may be simultaneously analyzed using one apparatus thereby greatly reducing an amount of time required for the analysis.
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Cho Kyoo-Chul
Heo Tae-Yeol
Kim Gi-Jung
Park Sook-Hyun
Coleman W. David
Lee & Morse P.C.
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