Apparatus for analysis of particulate material, analytical metho

Details Apparatus for analysis of particulate material, analytical metho Apparatus for analysis of particulate material, analytical metho

1991-08-05

1994-05-31

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

356335, 356336, H01L 2100

Patent

active

053169832

ABSTRACT:
An apparatus and a method for analysis of a particle by irradiation of the particle in a fluid with an intense laser pulse to cause laser breakdown and to detect sonic waves or plasma emission which are generated by the laser breakdown. The size of the particle is measured by using at least two kinds of information from the following: intensity of plasma emission or sonic wave generated by the laser breakdown, location of the laser breakdown plasma, and plasma emission waveform. Also, a laser pulse having flattened distribution of intensity for the irradiation is used in order to eliminate the dependence of the measured value on the particle location.

REFERENCES:
patent: 4652755 (1987-03-01), Solomon et al.
patent: 4808828 (1989-02-01), Kitamori et al.
patent: 4855023 (1989-08-01), Clark et al.
patent: 5015094 (1991-05-01), Oka et al.
patent: 5070300 (1991-12-01), Matsui et al.
patent: 5148031 (1992-09-01), Kamalov et al.

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