Apparatus for altering pitch in arrangement of wafers

Details Apparatus for altering pitch in arrangement of wafers Apparatus for altering pitch in arrangement of wafers

1984-12-18

1986-07-01

Staab, Lawrence J.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

29569R, 29759, 74 57, 74 59, 118500, 118728, 269 43, 294 871, 414331, C23F 102, H01L 2100

Patent

active

045978190

ABSTRACT:
A wafer arrangement pitch altering apparatus comprising a pair of cylindrical grooved cams parallelly disposed, a plurality of cylindrical grooves formed to intersect a given generatrix of the grooved cams with respectively equal pitches, disposed symmetrically each other around the peripheral surfaces of the cylindrical grooved cams, and intersections of the generatrix and the cylindrical grooved cams are moved at mutually dissimilar desired proportions along the axes of the cylindrical grooved cams in consequence of its rotation, plural pairs of moving elements disposed between the cylindrical grooved cams facing each other and provided with pins fitting into the cylindrical grooves on the corresponding cylindrical grooved cams, a pair of means for retaining the moving elements in a manner movable only in the axial direction of the cylindrical grooved cams, a cylindrical grooved cam driving element for rotating the cylindrical grooved cams by a prescribed angle in the mutually opposite directions, main grooves formed on the opposed surfaces of the moving elements and provided in the lower portions thereof with steplike parts adapted to receive wafers, a pair of support frames for severally holding in place the pairs of cylindrical grooved cams and retaining means, and a support frame moving element for altering the relative distance of the pair of support frames.

REFERENCES:
patent: 2723749 (1955-11-01), Peabody
patent: 2849710 (1958-08-01), Wade
patent: 3062529 (1962-11-01), Hiller
patent: 3302967 (1967-02-01), Harris et al.
patent: 3446161 (1969-05-01), Oddy
patent: 3661019 (1972-05-01), Kacalek et al.
patent: 3767027 (1973-10-01), Pund et al.
patent: 3860280 (1975-01-01), Karlsson
patent: 3977566 (1976-08-01), Hill et al.

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