Apparatus for affixing a rotating cylindrical magnetron target t

Details Apparatus for affixing a rotating cylindrical magnetron target t Apparatus for affixing a rotating cylindrical magnetron target t

1995-10-27

1997-01-07

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

C23C 1435

Patent

active

055913148

ABSTRACT:
An apparatus to releasably affix a rotating cylindrical magnetron target to a spindle utilizes a threaded spindle collar engaging threads on the outside surface of the target, with a single water-to-vacuum seal located at the target and spindle interface. The threads may be removable from the target, enabling efficient assembly/disassembly and recycling.

REFERENCES:
patent: 4407713 (1983-10-01), Zega
patent: 5096562 (1992-03-01), Boozenny et al.
patent: 5100527 (1992-03-01), Stevenson et al.
patent: 5171411 (1992-12-01), Hillendahl et al.
patent: 5298137 (1994-03-01), Marshall, III
patent: 5445721 (1995-08-01), Bower
patent: 5518592 (1996-05-01), Bower et al.

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