Apparatus for adjusting a gas injector of furnace

Details Apparatus for adjusting a gas injector of furnace Apparatus for adjusting a gas injector of furnace

1996-03-15

1997-09-23

Bennett, Henry A.

Heating

Work chamber having heating means

Work chamber having gaseous material supply or removal...

432241, 432200, F27B 504

Patent

active

056697686

ABSTRACT:
An improved apparatus is provided for adjusting a gas injector of a furnace in connection with oxidation, diffusion and heat treating in semiconductor processing. The apparatus includes a reaction tube for serving as a reaction chamber and heat sink. The gas injector is coupled to the reaction tube on one end and includes openings on the other end for passing source gas. An elongated open tube is secured to the gas injector and has its axis superimposed approximately on the axis of the gas injector.

REFERENCES:
patent: 5022853 (1991-06-01), Powell et al.
patent: 5247972 (1993-09-01), Tetreault

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