Apparatus for accurately registering a member and a substrate in

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...

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118504, C23C 1308

Patent

active

043722482

ABSTRACT:
Apparatus for accurately registering a first member in an interdependent relationship to a second member including prealigned registration members selectively mounted on the second member and having a first elongated member which defines a primary registration point, a second elongated member which defines a different secondary registration point, which together define a line of rotation, a third elongated member which defines a tertiary registration point located at a point other than on the line of rotation wherein each of the elongated members are positioned in a predetermined pattern and reference registration members mounted on the first member having a first receiving member which defines a primary reference point which receives and engages the first elongated member superimposing the primary registration point on the primary reference point, a second receiving member defining a reference line segment which extends in a preselected direction wherein the second receiving member receives and engages the second elongated member superimposing the second registration point on the reference line to establish a secondary reference point thereon, and a third receiving member defining a reference plane segment which lies in a predetermined direction wherein the third receiving member receives and engages the third elongated member superimposing the third registration point onto the reference plane segment to establish a tertiary reference point and wherein the elongated members co-act interdependently with the receiving members to restrain lineal and rotational movement between the first member and the second member loaded against each other without redundancy of constraint is shown.

REFERENCES:
patent: 2969296 (1961-01-01), Walsh
patent: 3207126 (1965-09-01), Byron
patent: 3230109 (1966-01-01), Domaleski
patent: 3510947 (1970-05-01), Tuccillo et al.
patent: 3516386 (1970-06-01), Landwehr et al.
patent: 3694919 (1972-10-01), Lee et al.
patent: 3747558 (1973-07-01), Harel
Brewer et al., "Apparatus for Depositing Thin Film Devices, IBM Tech. Disclosure Bulletin, vol. 21, No. 7, Dec. 1978, pp. 3016-3018.

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