Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent
1982-09-13
1987-01-06
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Having means to expose a portion of a substrate to coating...
118715, 427282, 29464, C23C 1308
Patent
active
046338101
ABSTRACT:
Apparatus for accurately registering a first member in an interdependent relationship to a second member including prealigned registration members selectively mounted on the second member and having a first elongated member which defines a primary registration point, a second elongated member which defines a different secondary registration point, which together define a line of rotation, a third elongated member which defines a tertiary registration point located at a point other than on the line of rotation wherein each of the elongated members are positioned in a predetermined pattern and reference registration members mounted on the first member having a first receiving member which defines a primary reference point which receives and engages the first elongated member superimposing the primary registration point on the primary reference point, a second receiving member defining a reference line segment which extends in a preselected direction wherein the second receiving member receives and engages the second elongated member superimposing the second registration point on the reference line to establish a secondary reference point thereon, and a third receiving member defining a reference plane segment which lies in a predetermined direction wherein the third receiving member receives and engages the third elongated member superimposing the third registration point onto the reference plane segment to establish a tertiary reference point and wherein the elongated members co-act interdependently with the receiving members to restrain lineal and rotational movement between the first member and the second member loaded against each other without redundancy of constraint is shown. A method for accurately registering a first member to a second member is also shown.
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Huntley et al. "Kinematr Mounts for Mask Alignment" IBM Tech. Disclosure Bulletin, vol. 21, No. 5, Oct. 1978, pp. 2024-2025.
Brewer et al. "App. for Depositing Thin Film Devices" IBM Tech. Disclosure Bulletin, vol. 21, No. 7, Dec. 1978, pp. 3016-3018.
Applied Magnetics Corp.
Bueker Richard
Meaney, Jr. Daniel J.
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