Apparatus for ablating high-density array of vias or...

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element

Reexamination Certificate

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C359S019000, C219S121610, C219S121680, C219S121690, C219S121700, C219S121740, C219S121750, C219S121820, C264S400000, C216S017000, C216S065000, C156S922000

Reexamination Certificate

active

06256121

ABSTRACT:

FIELD OF THE INVENTION
The present invention relates to a system for burning, drilling, or otherwise forming one or more desired vias, blind vias or other surface indentations, indicia, markings and/or other formations in a surface of a desired object, such as a substrate.
BACKGROUND OF THE INVENTION
There are currently available a variety of systems for forming a hole, a via, a blind via or some other surface indentation in an exterior surface of an object, but many of these systems are very expensive to purchase and operate at relatively slow production rates.
SUMMARY OF THE INVENTION
Wherefore, the present invention seeks to overcome the above noted drawbacks of the prior art by providing a system which is relatively inexpensive to purchase and maintain while, at the same time, operates at increased production speeds so that the desired vias, blind vias, or other surface indentations, apertures or other surface markings can be achieved in a surface of a desired object during a shorter period of production time.
A further object of the present invention is to provide a method and apparatus for ablating a desired high-density array or pattern of vias or other surface indentations or formations in a surface of an object to be processed.
Another object of the invention is to facilitate use of a variety of different lasers which operate at different wavelengths and pulse durations, to minimize the associated costs in connection with ablating a high-density array of blind vias, vias or other surface indentations or formations in a surface of an object to be processed. It is to be appreciated that an ultraviolet, a visual, an infrared as well as other types of lasers, extending across the entire spectrum, could be utilized in accordance with the teaching of the present invention.
Yet another object of the present invention is to provide a method and apparatus which allows the number of vias or other indentations or formations, to be formed in a surface of an object being processed, to be easily varied during production of the same by control of the intensity and/or duration of a substantially collimated or non-collimated light beam emanating from the laser.
Still another object of the invention is to provide an apparatus which is relatively less inexpensive to purchase and operate, in comparison to other known systems, while still improving the production rates of the objects to be processed.
The present invention also relates to an imaging system for ablating a desired array of features in an object to be processed, the imaging system comprising: a laser for generating an outputting a coherent light beam; an X-axis and Y-axis automatic repeat position for redirecting a path of the coherent light beam; a focusing member for receiving the redirected light from the X- and Y-axis repeat positioners and focusing the coherent light beam at a desired one of a plurality of holographic imaging segments forming a holographic imaging lens; and each one of the holographic imaging segments, comprising the holographic imaging lens, forming a desired formation in a surface of the object to be processed.
The present invention also relates to an imaging system for ablating a desired array of features in an object to be processed, the imaging system comprising: a laser for generating an outputting a coherent light beam; at least one expansion lens for receiving the coherent light beam, outputted by the laser, and suitably altering a diameter of the coherent light beam; an X-axis and Y-axis automatic repeat position for redirecting a path of the coherent light beam; a focusing member for receiving the redirected light from the X- and Y-axis repeat positioners and focusing the coherent light beam at a desired one of a plurality of holographic imaging segments forming a holographic imaging lens; and each one of the holographic imaging segments, comprising the holographic imaging lens, forming a desired formation in a surface of the object to be processed; and a computer for controlling operation of one or more of the laser, the X- and Y-repeat positioners, the focusing member, the holographic imaging lens, and a position of the object to be processed to facilitate ablating a desired array of features in the object to be processed.
The present invention also relates to an imaging system for ablating a desired array of features in an object to be processed, the imaging system comprising: laser means for generating an outputting a coherent light beam; an X-axis and Y-axis automatic repeat positing means for redirecting a path of the coherent light beam; focusing means for receiving the redirected light from the X- and Y-axis repeat positing means and focusing the coherent light beam at a desired one of a plurality of holographic imaging means forming a holographic imaging lens means; and each one of the holographic imaging means, comprising the holographic imaging lens means, forming a desired formation in a surface of the object to be processed.


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