Apparatus for aberration detection and measurement

Details Apparatus for aberration detection and measurement Apparatus for aberration detection and measurement

2006-09-27

2008-03-18

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

Distortion introducing or rectifying

C355S040000, C355S053000

Reexamination Certificate

active

07345735

ABSTRACT:
Aberrations in an optical system can be detected and measured using a method comprised of a test target in the object plane of a projection system and imaging a photoresist film with the system. The test target comprises at least one open figure which comprises a multiple component array of phase zones, where the multiple zones are arranged within the open figure so that their response to lens aberration is interrelated and the zones respond uniquely to specific aberrations depending on their location within the figure. This is a unique and new method of detecting a variety of aberration types including coma, spherical, astigmatism, and three-point through the exposure of a photoresist material placed in the image plane of the system and the evaluation of these images.

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