Brushing – scrubbing – and general cleaning – Machines – Wiping
Patent
1997-09-17
1998-09-15
El-Arini, Zeinab
Brushing, scrubbing, and general cleaning
Machines
Wiping
15 77, 15 883, 134 6, 134 7, 134 26, 134 28, 134 29, B08B 700
Patent
active
058061266
ABSTRACT:
A Method and Apparatus for Chemical Delivery Through the Brush used in semiconductor substrate cleaning processes. The chemical solutions are delivered to the core of a brush where the solution is absorbed by the brush and then applied by the brush onto the substrate. This delivery system applies the chemical solutions uniformly to the semiconductor substrate, reduces the volumes of chemical solutions used in a scrubbing process, and helps maintain control of the pH profile of a substrate. This system is described and illustrated in the manner it is used in conjunction with a scrubber that scrubs both sides of a semiconductor substrate.
REFERENCES:
patent: 2860354 (1958-11-01), Van Clief, Jr.
patent: 3500490 (1970-03-01), Teren
patent: 4461052 (1984-07-01), Mostul
patent: 4569695 (1986-02-01), Yamashita et al.
patent: 5518552 (1996-05-01), Tanoue et al.
patent: 5639311 (1997-06-01), Holley et al.
PVA Clean Sponge Material, Rippey Corporation, El Dorado Hills, CA 1992.
PVA Clean Sponge Material, Rippey Corporation, El Dorado Hills, CA 1995.
Post-CMP Cleaning Technology, SEMICON Korea 95, Process Technology, Semiconductor Equipment and Materials International (Jan. 19, 1995), 29-36 .
de Larios John Martin
Gardner Douglas Grant
Ravkin Mikhail
El-Arini Zeinab
OnTrak Systems, Inc.
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