Apparatus comprising a flexible vacuum seal pad structure...

Details Apparatus comprising a flexible vacuum seal pad structure... Apparatus comprising a flexible vacuum seal pad structure...

2005-09-13

2005-09-13

Kramer, Dean J. (Department: 3652)

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

C414S941000, C901S040000

Reexamination Certificate

active

06942265

ABSTRACT:
A flexible vacuum seal pad structure capable of, for example, sealingly securing a bowed substrate to a finger apparatus or “endeffector” used to robotically engage and/or move the substrate from one processing station to another, or capable of securing a wafer to a base member or susceptor during processing of the wafer, i.e., functioning as a chuck. The flexible vacuum seal pad structure of the invention comprises a hollow central post or shank which serves as a mounting or retention mechanism, a flexible arch-like member connected at one end to the central post, and a peripheral ring structure connected to the opposite end of the arch member. The peripheral ring structure contacts and forms a seal with the underside of the wafer, while the arch member provides the flexibility to permit the ring structure to make or form a sealing contact to a bowed wafer, and the central post provides a mechanism through which the flexible vacuum seal pad structure may be secured to the base or finger.

REFERENCES:
patent: 3720433 (1973-03-01), Rosfelder
patent: 4286815 (1981-09-01), Clark
patent: 4620738 (1986-11-01), Schwartz et al.
patent: 5226636 (1993-07-01), Nenadic et al.
patent: 5879040 (1999-03-01), Nagai et al.
patent: 5937993 (1999-08-01), Sheets et al.
patent: 6062241 (2000-05-01), Tateyama et al.

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