Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2002-06-24
2004-11-23
Budd, Mark (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S316010
Reexamination Certificate
active
06822372
ABSTRACT:
FIELD OF THE INVENTION
The invention relates to systems and methods for cleaning and/or processing parts. In particular, the invention relates to ultrasound systems, ultrasound generators, ultrasound transducers, and methods which support or enhance the application of ultrasound energy within liquid.
BACKGROUND OF THE INVENTION
The present invention relates to ultrasound cleaning systems, and more particularly, to systems, generators, transducers, circuitry and methods that clean and/or process by coupling sound waves into a liquid. Prior art ultrasound systems lack the ability to remove a wide range of particle types and sizes without doing damage to the part being cleaned or processed. This invention improves the performance of an ultrasound system while eliminating the damage causing mechanisms.
SUMMARY OF THE INVENTION
As defined in the technical literature, “ultrasound”, “ultrasonic” and “ultrasonics” generally refer to acoustic disturbances in a frequency range above about eighteen kilohertz (khz) and which extend upwards to over four megahertz (Mhz). As is commonly used in the cleaning industry and as used herein, “ultrasonic” will generally refer to acoustic disturbances in a frequency range above about eighteen kilohertz and extending up to about 90 khz. Ultrasound and ultrasonics will be used to mean the complete range of acoustic disturbances from about 18 khz to 4 Mhz, except when they are use with terms such as “lower frequency” ultrasound, “low frequency” ultrasound, “lower frequency” ultrasonics, or “low frequency” ultrasonics, then they will mean ultrasound between about 18 khz and 90 khz. “Megasonics” or “megasonic” refer to acoustic disturbances between about 600 khz and 4 Mhz. The prior art has manufactured “low frequency” and “megasonic” ultrasound systems. Typical prior art low frequency systems, for example, operate at 25 khz, 40 khz, and as high as 90 khz. Typical prior art megasonic systems operate between 600 khz and 1 Mhz. Certain aspects of the invention apply to low frequency ultrasound and to megasonics. However, certain aspects of the invention apply to ultrasound in the 100 khz to 350 khz region, a frequency range which is sometimes denoted herein as “microsonic” or “microsonics.” The upper end of the microsonic frequency range from about 300 khz to 350 khz is called herein “higher microsonics” or “higher frequency microsonic”.
As used herein, “resonant transducer” means a transducer operated at a frequency or in a range of frequencies that correspond to a one-half wavelength (&lgr;) of sound in the transducer stack. “Harmonic transducer” means a transducer operated at a frequency or in a range of frequencies that correspond to 1&lgr;, 1.5&lgr;, 2&lgr; or 2.5&lgr; of sound, and so on, in the transducer stack. The harmonics of a practical physical structure are often not exact integer multiples of the fundamental frequency, the literature sometimes refer to these non-integer harmonics as overtones. Herein, harmonics will mean resonances higher in frequency than the fundamental resonant frequency. “Bandwidth” means the range of frequencies in a resonant or harmonic region of a transducer over which the acoustic power output of a transducer remains between 50% and 100% of the maximum value.
As used herein, a “delicate part” refers to those parts which are undergoing a manufacture, process, or cleaning operation within liquid subjected to ultrasound energy. By way of example, one delicate part is a semiconductor wafer which has extremely small features and which is easily damaged by cavitation implosion. Another delicate part is a modern jet engine turbine blade which can fracture if excited into resonant vibration. A delicate part often defines components in the computer industry, including disk drives, semiconductor components, and the like.
As used herein, “khz” refers to kilohertz and a frequency magnitude of one thousand hertz. “Mhz” refers to megahertz and a frequency magnitude of one million hertz.
As used herein, “successive frequencies” are two or more waveforms that are produced, one at a time, in a series fashion, where at least two different frequencies exist within the set of waveforms. At the output of a generator, these waveforms generally form an AC voltage. In an ultrasound tank, these waveforms are normally represented by an ultrasound wave in the liquid.
As used herein, successive frequencies are said to “sweep” when the period or the half period of two or more of the waveforms are unequal to each other.
Sweeping frequency generators change their output frequency through successive frequencies in a bandwidth, e.g., sweeping from the lowest frequency in a chosen bandwidth through the bandwidth to the highest frequency in the chosen bandwidth, then sweeping from this highest frequency through the bandwidth back to the lowest frequency. The function of time for these frequency changes is typically linear, but other functions of time, such as part of an exponential, are possible. As used herein, “sweep frequency” refers to the reciprocal of the time that it takes for successive frequencies to make a round trip, for example, change from one frequency through the other frequencies and back to the original frequency. Although sweep rate might technically be interpreted as the rate of change from one successive frequency to the next, the more common usage for sweep rate will be used herein; that is, “sweep rate” means the same as sweep frequency. It is generally undesirable to operate an ultrasound transducer at a fixed, single frequency because of the resonances created at that frequency. Therefore, an ultrasound generator can sweep the operational frequency through some or all of the available frequencies within the transducer's bandwidth at a “sweep rate.” Accordingly, particular frequencies have only short duration during the sweep cycle (i.e., the time period for sweeping the ultrasound frequency up and down through a range of frequencies within the bandwidth). “Sweep the sweep rate” or “double sweeping” or “dual sweep” refer to an operation of changing the sweep rate as a function of time. In accord with the invention, “sweeping the sweep rate” generally refers to the operation of sweeping the sweep rate so as to reduce or eliminate resonances generated at a single sweep frequency. “Random sweep rate” or “chaotic sweep rate” refer to sweep rates where the successive sweep rates are numbers that are described by no well defined function, i.e., random or chaotic numbers.
The present invention concerns the applied uses of ultrasound energy, and in particular the application and control of ultrasonics to clean and process parts within a liquid. Generally, in accord with the invention, one or more ultrasound generators drive one or more ultrasound transducers, or arrays of transducers, coupled to a liquid to clean and/or process the part. The liquid is preferably held within a tank; and the transducers mount on or within the tank to impart ultrasound into the liquid. In this context, the invention is particularly directed to one or more of the following aspects and advantages:
(1) By utilizing harmonics of certain clamped ultrasound transducers, the invention generates, in one aspect, ultrasound within the liquid in a frequency range of between about 100 khz to 350 khz (i.e., “microsonic” frequencies). This has certain advantages over the prior art. In particular, unlike prior art ultrasonic systems which operate at less than 100 khz, the invention eliminates or greatly reduces damaging cavitation implosions within the liquid. Further, the transducers operating in this frequency range provide relatively uniform microstreaming, such as provided by megasonics; but they are also relatively rugged and reliable, unlike megasonic transducer elements. In addition, and unlike megasonics, microsonic waves are not highly collimated, or “beam-like,” within liquid; and therefore efficiently couple into the geometry of the ultrasound tank. Preferably, the application of microsonic frequencies to liquid occurs simultaneously with a sweeping of th
Budd Mark
The Bilicki Law Firm P.C.
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