Apparatus capable of adjusting the light amount

Details Apparatus capable of adjusting the light amount Apparatus capable of adjusting the light amount

1988-02-01

1989-11-28

Hix, L. T.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 69, 355 71, G03B 2772

Patent

active

048841013

ABSTRACT:
An apparatus for applying radiation to an object, such as pulsed laser light for exposing a semiconductor substrate, for example, applied through a shutter, includes a control system that determines the amount of light applied to the object. In one embodiment, the timing of light pulses ensures that a pulse is emitted at the time of complete shutter opening and also at the time of the start of shutter closing. In another embodiment, the period from the commencement of shutter closing to the completion of shutter closing is controlled so that it is an integer times the light pulse repetition period. The apparatus may also include a light energy detector, and the control system may calculate the amount of applied radiation and shutter operating periods.

REFERENCES:
patent: 4506977 (1985-03-01), Sata et al.
patent: 4512657 (1985-06-01), Sakato
patent: 4712910 (1987-12-01), Sakato

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