Apparatus and process for vacuum-holding an object

Details Apparatus and process for vacuum-holding an object Apparatus and process for vacuum-holding an object

1993-07-23

1994-07-12

Yuen, Henry C.

Radiant energy

Supported for nonsignalling objects of irradiation

25044011, 25044111, 250548, 378 34, G01N 2100

Patent

active

053291263

ABSTRACT:
Disclosed are an object holding process and and an apparatus therefor in which a process strain of the object can be accurately compensated for. When the exposure operation is started, the bottom surface of the object is held by a holding unit. If the object has a strain, the process strain is calculated. Here, if the process strain is larger than a tolerance, the temperature of the object is set to an object setting temperature in a position other than an exposure position in order to contract or expand the object by a predetermined amount for a magnification correction. The bottom surface of the object is then held by the holding unit again, and the exposure of the object is performed in the exposure position.

REFERENCES:
patent: 4969168 (1990-11-01), Sakamoto et al.
patent: 5063582 (1991-11-01), Mori et al.
patent: 5093579 (1992-03-01), Amemiya et al.
patent: 5131022 (1992-07-01), Terashima et al.
patent: 5138643 (1992-08-01), Sakamoto et al.
patent: 5142156 (1992-08-01), Ozawa et al.
patent: 5172189 (1992-12-01), Mitome
patent: 5172402 (1992-12-01), Mizusawa et al.
patent: 5191218 (1993-03-01), Mori et al.

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