Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent
1986-12-12
1989-06-13
Bueker, Richard
Coating apparatus
Gas or vapor deposition
Multizone chamber
118715, 118725, C23C 1600
Patent
active
048382019
ABSTRACT:
A vacuum chemical epitaxy apparatus comprising a first mixing chamber having an inlet for introducing a metal-organic gaseous materials and n-type and p-type dopants, and a plurality of outlets for directing the flow of said metal-organic gases and n-type and p-type dopants toward a substrate; a second mixing chamber disposed below said first chamber having an inlet for introducing a metal-organic gaseous material and n-type and p-type dopants, and a plurality of passages through said first chamber and an outlet for each passage, wherein the passage outlets are in substantially the same plane with the outlets of the first chamber; and means for exhausting the metal-organic gaseous materials and n-type and p-type dopants from the second chamber.
REFERENCES:
patent: 4171235 (1979-10-01), Fraas et al.
patent: 4401054 (1983-08-01), Matsuo
patent: 4404421 (1983-09-01), Fraas
patent: 4434742 (1984-03-01), Henaff
patent: 4582720 (1986-04-01), Yamazaki
L. M. Fraas et al., "Vacuum Chemical Epitaxy Utilizing Organometallic Sources," J. Elec. Materials, vol. 15, No. 3, pp. 175-180, May 1986.
L. D. Partain et al., "Vacuum MOCVD Fabrication of High Efficiency Cells for Multi-Junction Applications", Space Photovoltaic Research & Tech. Conference, Apr. 30-May 2, 1985, pp. 1-9.
Research on Multiband Gap Solar Cells, SERI Semiannual Control Report Mar. 31, 1985 to Aug. 31, 1985 submitted on or about Oct. 16, 1985 for initial approval and mailed to listed recipients on or about Dec. 16, 1985.
Vacuum Chemical Epitaxy by Chevron Research Company, Aug. 1986.
L. M. Fraas et al., "Epitaxial Growth from Organometallic Sources in High Vacuum", J. Vac. Sci. Technol. B4(1) Jan./Feb. 1986.
1985 Electronic Materials Conference Jun. 19-21, 1985 "The Use of Organometallic Sources . . . in a High Vacuum System", Fraas et al.
Research on Multiband GAP Solar Cells-Annual Report Mar. 1, 1984 to Mar. 31, 1985 final report submitted Jul. 15, 1985.
SERI Contract Monthly Report Apr. 1-30, 1985 submitted on or about May 15, 1985. (Applicants' understanding is that monthly reports are not published or available outside of reporting manager of government contract).
Cape John A.
Fraas Lewis M.
McLeod Paul S.
Bueker Richard
Daido Sanso K. K.
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