Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Patent
1989-04-27
1993-04-27
Snow, Walter E.
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
324202, 324236, G01B 710, G01R 3312, G01R 3500, G01N 2772
Patent
active
052065880
ABSTRACT:
The invention concerns apparatus and a process for the non-destructive measurement of the ohmic resistance of thin layers according to the eddy-current principle. Here an inductor (2) is fed with a high frequency voltage (U.sub.osz) and the magnetic field of this inductor (2) is directed at the thin layer to be measured, whereby an eddy current flows in this layer the magnetic field of which weakens the magnetic field of the inductor (2). The inductor (2) is here part of an oscillating circuit (3) which is held always at resonance by means of a phase-correcting arrangement (14). Under these resonance conditions the reactive values of the oscillating circuit (3) may be neglected so that the current flowing into the oscillating circuit (3) depends solely on the ohmic resistance of this oscillating circuit (3), which in turn is determined by the ohmic resistance of the layer to be measured.
REFERENCES:
patent: 2809346 (1957-10-01), Archer
patent: 4005359 (1977-01-01), Smoot
patent: 4105105 (1978-08-01), Braum
patent: 4187462 (1980-02-01), Haker et al.
patent: 4365196 (1982-12-01), Finch
patent: 4682105 (1987-07-01), Thorn
Leybold Aktiengesellschaft
Snow Walter E.
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