Measuring and testing – Gas analysis – Detector detail
Reexamination Certificate
2007-11-20
2007-11-20
Williams, Hezron (Department: 2856)
Measuring and testing
Gas analysis
Detector detail
C073S025010, C073S031060
Reexamination Certificate
active
11057594
ABSTRACT:
A gas detector and process for detecting a fluorine-containing species in a gas containing same, e.g., an effluent of a semiconductor processing tool undergoing etch cleaning with HF, NF3, etc. The detector in a preferred structural arrangement employs a microelectromechanical system (MEMS)-based device structure and/or a free-standing metal element that functions as a sensing component and optionally as a heat source when elevated temperature sensing is required. The free-standing metal element can be fabricated directly onto a standard chip carrier/device package so that the package becomes a platform of the detector.
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Baum Thomas H.
Chen Ing-Shin
Chen Philip S. H.
Dimeo, Jr. Frank
King Mackenzie E.
Advanced Technology & Materials Inc.
Gustafson Vincent K.
Intellectual Property / Technology Law
Saint-Surin Jacques M.
Shofi David M.
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