Apparatus and process for refilling a bubbler

Details Apparatus and process for refilling a bubbler Apparatus and process for refilling a bubbler

2007-10-09

2007-10-09

Keasel, Eric (Department: 3753)

Fluid handling

Processes

Involving pressure control

C137S209000, C261S053000

Reexamination Certificate

active

11061344

ABSTRACT:
In order to evaporate a liquid substance (3) and convey it to a user, a bubbler (1) is provided, into which a carrier gas (7) is conveyed. When a minimum level (4) has been reached, an exact quantity of the substance (3) is refilled from a reservoir tank (15). For this purpose, an intermediate tank (25) is provided, which is filled with an inert gas up to a pressure P1. An inert gas (21) is applied to the reservoir tank (15) at a pressure P2, higher than P1. The intermediate tank (25) is connected with the reservoir tank (15), as a result of which a specific quantity of the substance (3) flows into the intermediate tank (25) and is conveyed via a connection line (17) to the bubbler (1), with inert gas (32) first having been applied to the connection line (17) at a pressure P3, lower than P2.

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