Apparatus and process for producing high density axially extendi

Details Apparatus and process for producing high density axially extendi Apparatus and process for producing high density axially extendi

1994-06-16

1996-12-24

Breneman, R. Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

1566431, 216 67, 216 68, 118723I, C23F 102

Patent

active

055870384

ABSTRACT:
A high density elongated plasma is produced by the interaction of an electrically conductive planar antenna located outside of a processing chamber, and a magnetic field generating means, also located outside of the processing chamber. A magnetic field perpendicular to the plane of the antenna is generated within the processing chamber by the magnetic field generating means. The antenna is electrically coupled to a radio frequency power source to generate a helicon wave in the processing chamber to produce a plasma of a gas in the processing chamber. The magnetic field generated by the magnetic field generating means elongates the plasma within the processing chamber.

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M. W. Horn et al.; A Comparison of Etching Tools for Resist Pattern Transfer (1992); SPIE vol. 1672 Advances in Resist Technology and Processing IX; pp. 448-460.

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