Apparatus and process for positioning wafers in receiving device

Details Apparatus and process for positioning wafers in receiving device Apparatus and process for positioning wafers in receiving device

1989-06-30

1991-09-03

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With light detector

414416, 250548, 250561, G01B 1100, B65B 2102

Patent

active

050447521

ABSTRACT:
An apparatus is provided for loading and/or unloading wafers from a holding cassette to a quartz boat without scraping the wafer on the slots contained in the quartz boat; the apparatus comprising a robot and a paddle. The improvement resides in the main feature of wafer sensor means disposed on the surface of the paddle, the wafer sensor means being connected to a microprocessor which converts and digitizes an analog signal from the wafer sensor means, the analog signal indicating the position of a wafer disposed on the surface of the paddle. Further included is an arrangement for signaling the robot to compensate for the particular position of the wafer on the paddle by adjusting the position of the paddle with respect to the quartz boat. Another feature lies in the fact that sensing notches are disposed along the front, right-side and left-side edges of said paddle, each of the sensing notches having a sensor device and associated emitter means disposed on opposite sides of the sensing notches in such a manner as to permit detection of the position of the slots in the quartz boat stacking rods lying adjacent to respective sensing notches.

REFERENCES:
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patent: 4682928 (1987-07-01), Foulke et al.
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patent: 4765793 (1988-08-01), Goddeau
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4907035 (1990-03-01), Galburt et al.

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