Apparatus and process for polishing a substrate

Details Apparatus and process for polishing a substrate Apparatus and process for polishing a substrate

2005-09-13

2005-09-13

Rachuba, M. (Department: 3723)

Abrading

Machine

Reciprocating tool

C451S159000, C451S170000, C451S163000

Reexamination Certificate

active

06942554

ABSTRACT:
An apparatus for polishing a substrate with an optical surface. The apparatus contains a polishing pad and and a device for oscillating the polishing pad while simultaneously contacting it with at least 90 percent of said optical surface.

REFERENCES:
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patent: 6390903 (2002-05-01), Takahashi et al.
patent: 6629882 (2003-10-01), Takahashi et al.

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