Apparatus and process for object analysis by perturbation of int

Details Apparatus and process for object analysis by perturbation of int Apparatus and process for object analysis by perturbation of int

1984-10-09

1987-03-31

Arnold, Bruce Y.

Optics: measuring and testing

Range or remote distance finding

With photodetection

350320, 356345, G02B 2700, G01B 902

Patent

active

046538550

ABSTRACT:
Objects to be examined, such as tissue or any cellular or crystalline material, e.g. semiconductor wafers, are placed in a region of confluence of two interfering coherent beams of radiation which are at the same frequency and phase and at a frequency to which the object is semi-transparent. The beams are produced by separate sources or by refraction by a Fresnel biprism or any other interferometer structure. An off-axis parabolic reflection system is also disclosed. The interference fringe phase and amplitude perturbation produced by the object is detected and examined to derive information regarding physical properties of the object or abnormalities in its structure. Such abnormalities, as fractures or latent stresses in a semi-conductor wafer or the presence of tumors in biological tissue can be determined. Chemical characteristics of living tissue is determined by sweeping the frequency of the coherent radiation over a band which includes the absorption bands of given chemicals such as hydrogen, oxygen, sodium, and other materials which are representative of the structure of living tissue. The frequencies employed may be in the microwave band, millimeter band or higher.

REFERENCES:
patent: 4459027 (1984-07-01), Kafvi et al.

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