Apparatus and process for mass production of film by vacuum depo

Details Apparatus and process for mass production of film by vacuum depo Apparatus and process for mass production of film by vacuum depo

1983-05-05

1987-05-19

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

118 501, 118719, 118729, 42218629, B05D 306

Patent

active

046667342

ABSTRACT:
An apparatus and a process for mass production of films by vacuum deposition comprise a substrate charging stage which is evacuated, an interconnecting stage which is positioned adjacent to said substrate charging stage and is evacuated, and a film forming stage which is removably attached to the interconnecting stage and is evacuated independently of the interconnecting stage.

REFERENCES:
patent: 3086882 (1963-04-01), Smith et al.
patent: 3404661 (1968-10-01), Mathias et al.
patent: 3568632 (1971-03-01), Cawthon
patent: 3856654 (1974-12-01), George
patent: 3915117 (1975-10-01), Schertler
patent: 4226208 (1980-10-01), Nishida et al.
IBM Tech. Disc. Bull., vol. 11, No. 7, Dec. 1968, pp. 757, 758.
IBM Tech. Disc. Bull., vol. 18, No. 5, Oct. 1975, pp. 1504, 1505.

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