Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2005-11-01
2005-11-01
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C414S936000, C414S941000, C901S047000, C700S218000
Reexamination Certificate
active
06961639
ABSTRACT:
A device and process are provided for identifying characters inscribed on a semiconductor wafer containing an orientation mark. A semiconductor wafer having characters inscribed on a surface near its periphery is supported about its periphery between three rotary supports mounted on a grasping arm. An orientation mark on the periphery of the wafer is located adjacent the inscribed characters. At least one of the three rotary supports is rotatably driven to orient the wafer such that the orientation mark is placed in a determined position. An optical reflector is positioned in a spatial zone in proximity to and above the characters to be identified. The characters to be identified are illuminated by a light beam reflected by the optical reflector. The characters reflect the light, which may be observed by an optical imager, such as a camera. An optical recognition subsystem may then be used to identify the characters.
REFERENCES:
patent: 384939 (1888-06-01), Stollwerck
patent: 440984 (1890-11-01), Williams
patent: 3160295 (1964-12-01), Roark
patent: 3165186 (1965-01-01), Zeiter
patent: 3297134 (1967-01-01), Pastuszak
patent: 3480158 (1969-11-01), Pandjiris et al.
patent: 3499560 (1970-03-01), Le Gros
patent: 3712483 (1973-01-01), Messervey
patent: 3820647 (1974-06-01), Waugh, Jr. et al.
patent: 3972424 (1976-08-01), Levy et al.
patent: 3982627 (1976-09-01), Isohata
patent: 4094426 (1978-06-01), Vogel
patent: 4213318 (1980-07-01), Priebe
patent: 4244673 (1981-01-01), Henderson
patent: 4407627 (1983-10-01), Sato et al.
patent: 4423998 (1984-01-01), Inaba et al.
patent: 4427332 (1984-01-01), Manriquez
patent: 4436474 (1984-03-01), Brossman, Jr. et al.
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4466766 (1984-08-01), Geren et al.
patent: 4483434 (1984-11-01), Miwa et al.
patent: 4536122 (1985-08-01), Herrmann et al.
patent: 4568234 (1986-02-01), Lee et al.
patent: 4569625 (1986-02-01), Dorumsgaard et al.
patent: 4573851 (1986-03-01), Butler
patent: 4611966 (1986-09-01), Johnson
patent: 4621967 (1986-11-01), Masada
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4662811 (1987-05-01), Hayden
patent: 4682928 (1987-07-01), Foulke et al.
patent: 4685206 (1987-08-01), Kobayashi et al.
patent: 4687542 (1987-08-01), Davis et al.
patent: 4691817 (1987-09-01), Haar
patent: 4695217 (1987-09-01), Lau
patent: 4720130 (1988-01-01), Andou
patent: 4744715 (1988-05-01), Kawabata
patent: 4766322 (1988-08-01), Hashimoto
patent: 4775281 (1988-10-01), Prentakis
patent: 4787814 (1988-11-01), Vaerman
patent: 4806057 (1989-02-01), Cay et al.
patent: 4813840 (1989-03-01), Prabhakar et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4875824 (1989-10-01), Moe et al.
patent: 4887904 (1989-12-01), Nakazato et al.
patent: 4892455 (1990-01-01), Hine
patent: 4944650 (1990-07-01), Matsumoto
patent: 4947784 (1990-08-01), Nishi
patent: 4952115 (1990-08-01), Ohkase
patent: 4983842 (1991-01-01), Takamine
patent: 4987407 (1991-01-01), Lee
patent: 5015832 (1991-05-01), Filipski et al.
patent: 5022695 (1991-06-01), Ayers
patent: 5102291 (1992-04-01), Hine
patent: 5133635 (1992-07-01), Malin et al.
patent: 5265170 (1993-11-01), Hine et al.
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 5445486 (1995-08-01), Kitayama et al.
patent: 5452078 (1995-09-01), Cheng
patent: 5511934 (1996-04-01), Bacchi et al.
patent: 5513948 (1996-05-01), Bacchi et al.
patent: 5538385 (1996-07-01), Bacchi et al.
patent: 5697759 (1997-12-01), Bacchi et al.
patent: 5741113 (1998-04-01), Bacchi et al.
patent: 5831738 (1998-11-01), Hine
patent: 5870488 (1999-02-01), Rush et al.
patent: 5905850 (1999-05-01), Kaveh
patent: 5917169 (1999-06-01), Poli et al.
patent: 5944476 (1999-08-01), Bacchi et al.
patent: 5980187 (1999-11-01), Verhovsky et al.
patent: 5980194 (1999-11-01), Freerks et al.
patent: 6098484 (2000-08-01), Bacchi et al.
patent: 6105454 (2000-08-01), Bacchi et al.
patent: 6116848 (2000-09-01), Thomas et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6256555 (2001-07-01), Bacchi et al.
patent: 6275748 (2001-08-01), Bacchi et al.
patent: 6298280 (2001-10-01), Bonora et al.
patent: 6435807 (2002-08-01), Todorov et al.
patent: 6438460 (2002-08-01), Bacchi et al.
patent: 6453214 (2002-09-01), Bacchi et al.
patent: 6468022 (2002-10-01), Whitcomb
patent: 6591960 (2003-07-01), Babbs et al.
patent: 6612008 (2003-09-01), Thoma
patent: 6618645 (2003-09-01), Bacchi et al.
patent: 6652216 (2003-11-01), Astegno et al.
patent: 6682113 (2004-01-01), Cox et al.
patent: 6685422 (2004-02-01), Sundar et al.
patent: 6752585 (2004-06-01), Reimer et al.
patent: 6769861 (2004-08-01), Caveney
patent: 30 04 462 (1981-08-01), None
patent: 235 156 (1986-04-01), None
patent: 236 714 (1986-06-01), None
patent: 376 160 (1989-12-01), None
patent: 0 445 651 (1992-07-01), None
patent: 0 620 584 (1994-04-01), None
patent: 1 078 391 (1999-05-01), None
patent: 2 567 160 (1986-01-01), None
patent: 2 711 824 (1995-05-01), None
patent: 2 751 769 (1996-07-01), None
patent: 2 751 769 (1998-01-01), None
patent: 1 457 162 (1974-07-01), None
patent: 2 171 978 (1985-03-01), None
patent: 56-043718 (1981-04-01), None
patent: 56-024921 (1981-10-01), None
patent: 58-090735 (1983-05-01), None
patent: 58-144022 (1983-08-01), None
patent: 58-182846 (1983-10-01), None
patent: 59-104138 (1984-06-01), None
patent: 59-228720 (1984-12-01), None
patent: 61-267611 (1986-11-01), None
patent: 61-291335 (1986-12-01), None
patent: 62-004142 (1987-01-01), None
patent: 62-188642 (1987-08-01), None
patent: 02-122541 (1990-10-01), None
patent: 03-052248 (1991-06-01), None
patent: 03-296244 (1991-12-01), None
patent: 06-345261 (1994-12-01), None
patent: 85564 (1957-07-01), None
patent: 879681 (1981-07-01), None
patent: WO 80/00073 (1980-01-01), None
patent: WO 83/04240 (1983-12-01), None
patent: WO 84/04739 (1984-12-01), None
patent: WO 97/45861 (1997-12-01), None
patent: WO 97/45861 (1997-12-01), None
patent: WO 99/57752 (1999-11-01), None
Declaration of Laurent Moesle for Response to Office Action.
Declaration and SPP 12 product documents, filed in connection with Recif's U.S. Patent Appl. No. 09/674,613, now U.S. Patent No. 6,652,216, Exhibit A of the Declaration of Laurent Moesle for Response to Office Action, 19 pages total.
Proforma Invoice NBRL2494-06-98 and two pages of air bill documents relating to the importation of one unit of the SPP300A product into the United States in Jun., 1998, Exhibit B of the Declaration of Laurent Moesle for Response to Office Action, 3 pages total.
Facsimile correspondence from Hannah Levy dated Jul. 24, 1998, Exhibit C of the Declaration of Laurent Moesle for Response to Office Action, 1 page total.
IBM Corp., “Semiconductor Transportation Sensing Alignment Technique,” Technical Disclosure Bulletin, vol. 20, No. 2, Jul. 1977, pp. 533-534.
Semiconductor Equipment Assessment, “Recif Foup/Open Cassette Sorter, SPP12,” Result Bulletin, Bulletin No. 1, Jan. 2000, 2 pages total.
Astegno Pierre
El Jarjini Mohammed
Gaudon Alain
Recif, Societe Anonyme
Townsend and Townsend / and Crew LLP
Tran Khoi H.
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