Apparatus and process for high speed laminate processing with co

Details Apparatus and process for high speed laminate processing with co Apparatus and process for high speed laminate processing with co

1994-02-25

1996-11-05

Walberg, Teresa J.

Electric heating

Metal heating

By arc

21912173, 21912175, 2191218, 359 15, 264400, B23K 2606

Patent

active

055714293

ABSTRACT:
In an apparatus and process for the direct ablation of substrates, an optical train is disclosed which enables large substrates to be processed from relatively small optical masks containing subaperture groups. Optical masks, preferably in the form of transparent plates containing computer generated holograms, are provided with at least discrete subaperture groups for sequential scanning and hence sequential processing of the substrate. A scanning beam in combination with a variable aperture overlying the mask sequentially scans the subaperture groups of the plates to produce direct laser ablation from a subaperture group intended to be scanned and prevents partial scanning of adjacent subaperture groups. Specialized plates with overlying generally negative lenses and subapertures elongated with respect to the radial direction of optical divergence are utilized to project images out from under the respective computer generated holograms to locations at the side of the plates without distortion. The plates enable both ablation of local openings within the substrates as well as the preparation of surfaces surrounding such openings for both cleansing of the working surface of the substrate as well as preparation of the surface of the substrate for receipt of further processing such as plating. Excising of both completed circuits and areas on substrates is disclosed. A preferred embodiment includes a compression telescope combined with a preferred scanning mirror train to minimize mirror size with ablation from underneath a horizontally or vertically disposed substrate so that generated debris falling or cleaned from the substrate falls away from the processed product.

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